JPS5711228Y2 - - Google Patents

Info

Publication number
JPS5711228Y2
JPS5711228Y2 JP3361575U JP3361575U JPS5711228Y2 JP S5711228 Y2 JPS5711228 Y2 JP S5711228Y2 JP 3361575 U JP3361575 U JP 3361575U JP 3361575 U JP3361575 U JP 3361575U JP S5711228 Y2 JPS5711228 Y2 JP S5711228Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3361575U
Other languages
Japanese (ja)
Other versions
JPS51115066U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3361575U priority Critical patent/JPS5711228Y2/ja
Publication of JPS51115066U publication Critical patent/JPS51115066U/ja
Application granted granted Critical
Publication of JPS5711228Y2 publication Critical patent/JPS5711228Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP3361575U 1975-03-14 1975-03-14 Expired JPS5711228Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3361575U JPS5711228Y2 (enrdf_load_html_response) 1975-03-14 1975-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3361575U JPS5711228Y2 (enrdf_load_html_response) 1975-03-14 1975-03-14

Publications (2)

Publication Number Publication Date
JPS51115066U JPS51115066U (enrdf_load_html_response) 1976-09-18
JPS5711228Y2 true JPS5711228Y2 (enrdf_load_html_response) 1982-03-05

Family

ID=28146848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3361575U Expired JPS5711228Y2 (enrdf_load_html_response) 1975-03-14 1975-03-14

Country Status (1)

Country Link
JP (1) JPS5711228Y2 (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2791038B2 (ja) * 1988-06-24 1998-08-27 株式会社日立製作所 分光器及びそれを用いた投影露光装置並びに投影露光方法
WO2024143124A1 (ja) * 2022-12-28 2024-07-04 株式会社堀場製作所 分光分析装置及び分光分析方法

Also Published As

Publication number Publication date
JPS51115066U (enrdf_load_html_response) 1976-09-18

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