JPS5711003B2 - - Google Patents
Info
- Publication number
- JPS5711003B2 JPS5711003B2 JP3255074A JP3255074A JPS5711003B2 JP S5711003 B2 JPS5711003 B2 JP S5711003B2 JP 3255074 A JP3255074 A JP 3255074A JP 3255074 A JP3255074 A JP 3255074A JP S5711003 B2 JPS5711003 B2 JP S5711003B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3255074A JPS5711003B2 (ja) | 1974-03-25 | 1974-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3255074A JPS5711003B2 (ja) | 1974-03-25 | 1974-03-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50126454A JPS50126454A (ja) | 1975-10-04 |
| JPS5711003B2 true JPS5711003B2 (ja) | 1982-03-02 |
Family
ID=12362029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3255074A Expired JPS5711003B2 (ja) | 1974-03-25 | 1974-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5711003B2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5138256A (en) * | 1991-04-23 | 1992-08-11 | International Business Machines Corp. | Method and apparatus for determining the thickness of an interfacial polysilicon/silicon oxide film |
-
1974
- 1974-03-25 JP JP3255074A patent/JPS5711003B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50126454A (ja) | 1975-10-04 |