JPS57107079U - - Google Patents
Info
- Publication number
- JPS57107079U JPS57107079U JP18568280U JP18568280U JPS57107079U JP S57107079 U JPS57107079 U JP S57107079U JP 18568280 U JP18568280 U JP 18568280U JP 18568280 U JP18568280 U JP 18568280U JP S57107079 U JPS57107079 U JP S57107079U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18568280U JPS57107079U (ja) | 1980-12-24 | 1980-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18568280U JPS57107079U (ja) | 1980-12-24 | 1980-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57107079U true JPS57107079U (ja) | 1982-07-01 |
Family
ID=29986950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18568280U Pending JPS57107079U (ja) | 1980-12-24 | 1980-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57107079U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000075544A1 (fr) * | 1999-06-02 | 2000-12-14 | Tokyo Electron Limited | Clapet et appareil de traitement sous vide comportant ce clapet |
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1980
- 1980-12-24 JP JP18568280U patent/JPS57107079U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000075544A1 (fr) * | 1999-06-02 | 2000-12-14 | Tokyo Electron Limited | Clapet et appareil de traitement sous vide comportant ce clapet |
| EP1215430A1 (en) * | 1999-06-02 | 2002-06-19 | Tokyo Electron Limited | Valve and vacuum processing device with the valve |
| EP1215430A4 (en) * | 1999-06-02 | 2002-10-30 | Tokyo Electron Ltd | VALVE AND VACUUM PROCESSING APPARATUS COMPRISING THIS VALVE |