JPS57106758U - - Google Patents
Info
- Publication number
- JPS57106758U JPS57106758U JP18165980U JP18165980U JPS57106758U JP S57106758 U JPS57106758 U JP S57106758U JP 18165980 U JP18165980 U JP 18165980U JP 18165980 U JP18165980 U JP 18165980U JP S57106758 U JPS57106758 U JP S57106758U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18165980U JPS6111222Y2 (https=) | 1980-12-19 | 1980-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18165980U JPS6111222Y2 (https=) | 1980-12-19 | 1980-12-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57106758U true JPS57106758U (https=) | 1982-07-01 |
| JPS6111222Y2 JPS6111222Y2 (https=) | 1986-04-09 |
Family
ID=29979331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18165980U Expired JPS6111222Y2 (https=) | 1980-12-19 | 1980-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6111222Y2 (https=) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008291361A (ja) * | 2007-04-27 | 2008-12-04 | Applied Materials Inc | 基板支持体、基板処理装置及び基板の載置方法 |
| KR101161388B1 (ko) | 2009-02-26 | 2012-07-02 | 가부시키가이샤 재팬 디스프레이 이스트 | 진공증착장치의 중량판 및 그것을 사용한 진공증착장치 |
| JP2014075436A (ja) * | 2012-10-03 | 2014-04-24 | Nissin Ion Equipment Co Ltd | 基板ホルダ |
| JP2021519861A (ja) * | 2018-03-29 | 2021-08-12 | エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン | 基板の選択的な蒸気コーティングのための装置および方法 |
-
1980
- 1980-12-19 JP JP18165980U patent/JPS6111222Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008291361A (ja) * | 2007-04-27 | 2008-12-04 | Applied Materials Inc | 基板支持体、基板処理装置及び基板の載置方法 |
| KR101161388B1 (ko) | 2009-02-26 | 2012-07-02 | 가부시키가이샤 재팬 디스프레이 이스트 | 진공증착장치의 중량판 및 그것을 사용한 진공증착장치 |
| JP2014075436A (ja) * | 2012-10-03 | 2014-04-24 | Nissin Ion Equipment Co Ltd | 基板ホルダ |
| JP2021519861A (ja) * | 2018-03-29 | 2021-08-12 | エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン | 基板の選択的な蒸気コーティングのための装置および方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6111222Y2 (https=) | 1986-04-09 |