JPS57106758U - - Google Patents
Info
- Publication number
- JPS57106758U JPS57106758U JP18165980U JP18165980U JPS57106758U JP S57106758 U JPS57106758 U JP S57106758U JP 18165980 U JP18165980 U JP 18165980U JP 18165980 U JP18165980 U JP 18165980U JP S57106758 U JPS57106758 U JP S57106758U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18165980U JPS6111222Y2 (en) | 1980-12-19 | 1980-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18165980U JPS6111222Y2 (en) | 1980-12-19 | 1980-12-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57106758U true JPS57106758U (en) | 1982-07-01 |
| JPS6111222Y2 JPS6111222Y2 (en) | 1986-04-09 |
Family
ID=29979331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18165980U Expired JPS6111222Y2 (en) | 1980-12-19 | 1980-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6111222Y2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008291361A (en) * | 2007-04-27 | 2008-12-04 | Applied Materials Inc | Substrate support, substrate processing device and method of placing substrate |
| JP4707271B2 (en) * | 2001-06-29 | 2011-06-22 | 三洋電機株式会社 | Method for manufacturing electroluminescence element |
| KR101161388B1 (en) | 2009-02-26 | 2012-07-02 | 가부시키가이샤 재팬 디스프레이 이스트 | Weight plate of vacuum evaporation apparatus and vacuum evaporation apparatus using the same |
| JP2014075436A (en) * | 2012-10-03 | 2014-04-24 | Nissin Ion Equipment Co Ltd | Substrate holder |
| JP2021519861A (en) * | 2018-03-29 | 2021-08-12 | エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン | Equipment and methods for selective vapor coating of substrates |
-
1980
- 1980-12-19 JP JP18165980U patent/JPS6111222Y2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4707271B2 (en) * | 2001-06-29 | 2011-06-22 | 三洋電機株式会社 | Method for manufacturing electroluminescence element |
| JP2008291361A (en) * | 2007-04-27 | 2008-12-04 | Applied Materials Inc | Substrate support, substrate processing device and method of placing substrate |
| KR101161388B1 (en) | 2009-02-26 | 2012-07-02 | 가부시키가이샤 재팬 디스프레이 이스트 | Weight plate of vacuum evaporation apparatus and vacuum evaporation apparatus using the same |
| JP2014075436A (en) * | 2012-10-03 | 2014-04-24 | Nissin Ion Equipment Co Ltd | Substrate holder |
| JP2021519861A (en) * | 2018-03-29 | 2021-08-12 | エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン | Equipment and methods for selective vapor coating of substrates |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6111222Y2 (en) | 1986-04-09 |