JPS57104524U - - Google Patents

Info

Publication number
JPS57104524U
JPS57104524U JP18298780U JP18298780U JPS57104524U JP S57104524 U JPS57104524 U JP S57104524U JP 18298780 U JP18298780 U JP 18298780U JP 18298780 U JP18298780 U JP 18298780U JP S57104524 U JPS57104524 U JP S57104524U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18298780U
Other languages
Japanese (ja)
Other versions
JPS6221005Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980182987U priority Critical patent/JPS6221005Y2/ja
Publication of JPS57104524U publication Critical patent/JPS57104524U/ja
Application granted granted Critical
Publication of JPS6221005Y2 publication Critical patent/JPS6221005Y2/ja
Expired legal-status Critical Current

Links

JP1980182987U 1980-12-19 1980-12-19 Expired JPS6221005Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980182987U JPS6221005Y2 (enExample) 1980-12-19 1980-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980182987U JPS6221005Y2 (enExample) 1980-12-19 1980-12-19

Publications (2)

Publication Number Publication Date
JPS57104524U true JPS57104524U (enExample) 1982-06-28
JPS6221005Y2 JPS6221005Y2 (enExample) 1987-05-28

Family

ID=29981842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980182987U Expired JPS6221005Y2 (enExample) 1980-12-19 1980-12-19

Country Status (1)

Country Link
JP (1) JPS6221005Y2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539630A (en) * 1978-09-13 1980-03-19 Fujitsu Ltd Vapor phase growth device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539630A (en) * 1978-09-13 1980-03-19 Fujitsu Ltd Vapor phase growth device

Also Published As

Publication number Publication date
JPS6221005Y2 (enExample) 1987-05-28

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