JPS57104524U - - Google Patents
Info
- Publication number
- JPS57104524U JPS57104524U JP18298780U JP18298780U JPS57104524U JP S57104524 U JPS57104524 U JP S57104524U JP 18298780 U JP18298780 U JP 18298780U JP 18298780 U JP18298780 U JP 18298780U JP S57104524 U JPS57104524 U JP S57104524U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980182987U JPS6221005Y2 (en:Method) | 1980-12-19 | 1980-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980182987U JPS6221005Y2 (en:Method) | 1980-12-19 | 1980-12-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57104524U true JPS57104524U (en:Method) | 1982-06-28 |
| JPS6221005Y2 JPS6221005Y2 (en:Method) | 1987-05-28 |
Family
ID=29981842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980182987U Expired JPS6221005Y2 (en:Method) | 1980-12-19 | 1980-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6221005Y2 (en:Method) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5539630A (en) * | 1978-09-13 | 1980-03-19 | Fujitsu Ltd | Vapor phase growth device |
-
1980
- 1980-12-19 JP JP1980182987U patent/JPS6221005Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5539630A (en) * | 1978-09-13 | 1980-03-19 | Fujitsu Ltd | Vapor phase growth device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6221005Y2 (en:Method) | 1987-05-28 |