JPS5710295B2 - - Google Patents
Info
- Publication number
- JPS5710295B2 JPS5710295B2 JP118273A JP118273A JPS5710295B2 JP S5710295 B2 JPS5710295 B2 JP S5710295B2 JP 118273 A JP118273 A JP 118273A JP 118273 A JP118273 A JP 118273A JP S5710295 B2 JPS5710295 B2 JP S5710295B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Fluid-Damping Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP118273A JPS5710295B2 (cs) | 1972-12-29 | 1972-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP118273A JPS5710295B2 (cs) | 1972-12-29 | 1972-12-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4989066A JPS4989066A (cs) | 1974-08-26 |
| JPS5710295B2 true JPS5710295B2 (cs) | 1982-02-25 |
Family
ID=11494296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP118273A Expired JPS5710295B2 (cs) | 1972-12-29 | 1972-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5710295B2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11244848B2 (en) | 2018-06-07 | 2022-02-08 | Semes Co., Ltd. | Apparatus and method for treating substrate |
-
1972
- 1972-12-29 JP JP118273A patent/JPS5710295B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11244848B2 (en) | 2018-06-07 | 2022-02-08 | Semes Co., Ltd. | Apparatus and method for treating substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4989066A (cs) | 1974-08-26 |