JPS57102133U - - Google Patents

Info

Publication number
JPS57102133U
JPS57102133U JP17820280U JP17820280U JPS57102133U JP S57102133 U JPS57102133 U JP S57102133U JP 17820280 U JP17820280 U JP 17820280U JP 17820280 U JP17820280 U JP 17820280U JP S57102133 U JPS57102133 U JP S57102133U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17820280U
Other languages
Japanese (ja)
Other versions
JPH019153Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17820280U priority Critical patent/JPH019153Y2/ja
Publication of JPS57102133U publication Critical patent/JPS57102133U/ja
Application granted granted Critical
Publication of JPH019153Y2 publication Critical patent/JPH019153Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP17820280U 1980-12-12 1980-12-12 Expired JPH019153Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17820280U JPH019153Y2 (https=) 1980-12-12 1980-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17820280U JPH019153Y2 (https=) 1980-12-12 1980-12-12

Publications (2)

Publication Number Publication Date
JPS57102133U true JPS57102133U (https=) 1982-06-23
JPH019153Y2 JPH019153Y2 (https=) 1989-03-13

Family

ID=29972779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17820280U Expired JPH019153Y2 (https=) 1980-12-12 1980-12-12

Country Status (1)

Country Link
JP (1) JPH019153Y2 (https=)

Also Published As

Publication number Publication date
JPH019153Y2 (https=) 1989-03-13

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