JPS57100229U - - Google Patents
Info
- Publication number
- JPS57100229U JPS57100229U JP16760481U JP16760481U JPS57100229U JP S57100229 U JPS57100229 U JP S57100229U JP 16760481 U JP16760481 U JP 16760481U JP 16760481 U JP16760481 U JP 16760481U JP S57100229 U JPS57100229 U JP S57100229U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16760481U JPS57100229U (en) | 1981-11-12 | 1981-11-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16760481U JPS57100229U (en) | 1981-11-12 | 1981-11-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57100229U true JPS57100229U (en) | 1982-06-19 |
Family
ID=29959686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16760481U Pending JPS57100229U (en) | 1981-11-12 | 1981-11-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57100229U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0341729A (en) * | 1989-07-07 | 1991-02-22 | Tokyo Electron Ltd | Substrate cleaning |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4999480A (en) * | 1973-01-02 | 1974-09-19 |
-
1981
- 1981-11-12 JP JP16760481U patent/JPS57100229U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4999480A (en) * | 1973-01-02 | 1974-09-19 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0341729A (en) * | 1989-07-07 | 1991-02-22 | Tokyo Electron Ltd | Substrate cleaning |