JPS5710009B2 - - Google Patents
Info
- Publication number
- JPS5710009B2 JPS5710009B2 JP4341975A JP4341975A JPS5710009B2 JP S5710009 B2 JPS5710009 B2 JP S5710009B2 JP 4341975 A JP4341975 A JP 4341975A JP 4341975 A JP4341975 A JP 4341975A JP S5710009 B2 JPS5710009 B2 JP S5710009B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Relays Between Conveyors (AREA)
- Control Of Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4341975A JPS51118264A (en) | 1975-04-11 | 1975-04-11 | Device for confirming fixed position of transferred |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4341975A JPS51118264A (en) | 1975-04-11 | 1975-04-11 | Device for confirming fixed position of transferred |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51118264A JPS51118264A (en) | 1976-10-18 |
| JPS5710009B2 true JPS5710009B2 (Direct) | 1982-02-24 |
Family
ID=12663177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4341975A Granted JPS51118264A (en) | 1975-04-11 | 1975-04-11 | Device for confirming fixed position of transferred |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51118264A (Direct) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5844721A (ja) * | 1982-08-31 | 1983-03-15 | Toshiba Corp | 半導体ウエハベ−キング装置 |
-
1975
- 1975-04-11 JP JP4341975A patent/JPS51118264A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51118264A (en) | 1976-10-18 |