JPS569706B2 - - Google Patents

Info

Publication number
JPS569706B2
JPS569706B2 JP8980172A JP8980172A JPS569706B2 JP S569706 B2 JPS569706 B2 JP S569706B2 JP 8980172 A JP8980172 A JP 8980172A JP 8980172 A JP8980172 A JP 8980172A JP S569706 B2 JPS569706 B2 JP S569706B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8980172A
Other languages
Japanese (ja)
Other versions
JPS4948344A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8980172A priority Critical patent/JPS569706B2/ja
Publication of JPS4948344A publication Critical patent/JPS4948344A/ja
Publication of JPS569706B2 publication Critical patent/JPS569706B2/ja
Expired legal-status Critical Current

Links

JP8980172A 1972-09-07 1972-09-07 Expired JPS569706B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8980172A JPS569706B2 (en) 1972-09-07 1972-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8980172A JPS569706B2 (en) 1972-09-07 1972-09-07

Publications (2)

Publication Number Publication Date
JPS4948344A JPS4948344A (en) 1974-05-10
JPS569706B2 true JPS569706B2 (en) 1981-03-03

Family

ID=13980803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8980172A Expired JPS569706B2 (en) 1972-09-07 1972-09-07

Country Status (1)

Country Link
JP (1) JPS569706B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017628A (en) * 1973-06-14 1975-02-25
JP4269295B2 (en) 2007-02-20 2009-05-27 セイコーエプソン株式会社 Manufacturing method of fine structure

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
APPLIED OPTICS#V9#N7 *

Also Published As

Publication number Publication date
JPS4948344A (en) 1974-05-10

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