JPS5694038U - - Google Patents

Info

Publication number
JPS5694038U
JPS5694038U JP17625679U JP17625679U JPS5694038U JP S5694038 U JPS5694038 U JP S5694038U JP 17625679 U JP17625679 U JP 17625679U JP 17625679 U JP17625679 U JP 17625679U JP S5694038 U JPS5694038 U JP S5694038U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17625679U
Other languages
Japanese (ja)
Other versions
JPS6231972Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979176256U priority Critical patent/JPS6231972Y2/ja
Publication of JPS5694038U publication Critical patent/JPS5694038U/ja
Application granted granted Critical
Publication of JPS6231972Y2 publication Critical patent/JPS6231972Y2/ja
Expired legal-status Critical Current

Links

JP1979176256U 1979-12-21 1979-12-21 Expired JPS6231972Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979176256U JPS6231972Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-12-21 1979-12-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979176256U JPS6231972Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-12-21 1979-12-21

Publications (2)

Publication Number Publication Date
JPS5694038U true JPS5694038U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-07-25
JPS6231972Y2 JPS6231972Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-15

Family

ID=29686897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979176256U Expired JPS6231972Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-12-21 1979-12-21

Country Status (1)

Country Link
JP (1) JPS6231972Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62113347A (ja) * 1985-11-11 1987-05-25 Nissin Electric Co Ltd ウエハ−保持装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5027898U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-07-06 1975-03-31
JPS5488270U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-12-05 1979-06-22

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5027898U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-07-06 1975-03-31
JPS5488270U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-12-05 1979-06-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62113347A (ja) * 1985-11-11 1987-05-25 Nissin Electric Co Ltd ウエハ−保持装置

Also Published As

Publication number Publication date
JPS6231972Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-15

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