JPS56921B2 - - Google Patents

Info

Publication number
JPS56921B2
JPS56921B2 JP5403276A JP5403276A JPS56921B2 JP S56921 B2 JPS56921 B2 JP S56921B2 JP 5403276 A JP5403276 A JP 5403276A JP 5403276 A JP5403276 A JP 5403276A JP S56921 B2 JPS56921 B2 JP S56921B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5403276A
Other languages
Japanese (ja)
Other versions
JPS52136390A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5403276A priority Critical patent/JPS52136390A/ja
Publication of JPS52136390A publication Critical patent/JPS52136390A/ja
Publication of JPS56921B2 publication Critical patent/JPS56921B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Adjustable Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
JP5403276A 1976-05-11 1976-05-11 Resistance compound Granted JPS52136390A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5403276A JPS52136390A (en) 1976-05-11 1976-05-11 Resistance compound

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5403276A JPS52136390A (en) 1976-05-11 1976-05-11 Resistance compound

Publications (2)

Publication Number Publication Date
JPS52136390A JPS52136390A (en) 1977-11-15
JPS56921B2 true JPS56921B2 (nl) 1981-01-10

Family

ID=12959234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5403276A Granted JPS52136390A (en) 1976-05-11 1976-05-11 Resistance compound

Country Status (1)

Country Link
JP (1) JPS52136390A (nl)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10969701B2 (en) 2014-11-17 2021-04-06 Asml Netherlands B.V. Pellicle attachment apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10969701B2 (en) 2014-11-17 2021-04-06 Asml Netherlands B.V. Pellicle attachment apparatus
US11003098B2 (en) 2014-11-17 2021-05-11 Asml Netherlands B.V Pellicle attachment apparatus
US11009803B2 (en) 2014-11-17 2021-05-18 Asml Netherlands B.V. Mask assembly

Also Published As

Publication number Publication date
JPS52136390A (en) 1977-11-15

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