JPS568916B2 - - Google Patents

Info

Publication number
JPS568916B2
JPS568916B2 JP1074275A JP1074275A JPS568916B2 JP S568916 B2 JPS568916 B2 JP S568916B2 JP 1074275 A JP1074275 A JP 1074275A JP 1074275 A JP1074275 A JP 1074275A JP S568916 B2 JPS568916 B2 JP S568916B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1074275A
Other languages
Japanese (ja)
Other versions
JPS5186081A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1074275A priority Critical patent/JPS5186081A/ja
Publication of JPS5186081A publication Critical patent/JPS5186081A/ja
Publication of JPS568916B2 publication Critical patent/JPS568916B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1074275A 1975-01-24 1975-01-24 Kosokusupatsutasochi Granted JPS5186081A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1074275A JPS5186081A (ja) 1975-01-24 1975-01-24 Kosokusupatsutasochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1074275A JPS5186081A (ja) 1975-01-24 1975-01-24 Kosokusupatsutasochi

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP17948381A Division JPS5845379A (ja) 1981-11-09 1981-11-09 高速スパッタ装置

Publications (2)

Publication Number Publication Date
JPS5186081A JPS5186081A (ja) 1976-07-28
JPS568916B2 true JPS568916B2 (enrdf_load_html_response) 1981-02-26

Family

ID=11758741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1074275A Granted JPS5186081A (ja) 1975-01-24 1975-01-24 Kosokusupatsutasochi

Country Status (1)

Country Link
JP (1) JPS5186081A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS5186081A (ja) 1976-07-28

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