JPS568493B2 - - Google Patents

Info

Publication number
JPS568493B2
JPS568493B2 JP5645077A JP5645077A JPS568493B2 JP S568493 B2 JPS568493 B2 JP S568493B2 JP 5645077 A JP5645077 A JP 5645077A JP 5645077 A JP5645077 A JP 5645077A JP S568493 B2 JPS568493 B2 JP S568493B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5645077A
Other languages
Japanese (ja)
Other versions
JPS53142180A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5645077A priority Critical patent/JPS53142180A/en
Publication of JPS53142180A publication Critical patent/JPS53142180A/en
Publication of JPS568493B2 publication Critical patent/JPS568493B2/ja
Granted legal-status Critical Current

Links

JP5645077A 1977-05-18 1977-05-18 Pattern transcribing method and transcribing intermediate body Granted JPS53142180A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5645077A JPS53142180A (en) 1977-05-18 1977-05-18 Pattern transcribing method and transcribing intermediate body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5645077A JPS53142180A (en) 1977-05-18 1977-05-18 Pattern transcribing method and transcribing intermediate body

Publications (2)

Publication Number Publication Date
JPS53142180A JPS53142180A (en) 1978-12-11
JPS568493B2 true JPS568493B2 (en) 1981-02-24

Family

ID=13027426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5645077A Granted JPS53142180A (en) 1977-05-18 1977-05-18 Pattern transcribing method and transcribing intermediate body

Country Status (1)

Country Link
JP (1) JPS53142180A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6341598U (en) * 1986-09-03 1988-03-18

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4310743A (en) * 1979-09-24 1982-01-12 Hughes Aircraft Company Ion beam lithography process and apparatus using step-and-repeat exposure
JPS56167330A (en) * 1980-05-29 1981-12-23 Nippon Telegr & Teleph Corp <Ntt> Fine pattern forming method
JPS5892223A (en) * 1981-11-27 1983-06-01 Matsushita Electronics Corp Resist pattern formation
JPS5895383U (en) * 1981-12-22 1983-06-28 ヤンマー農機株式会社 Crawler position confirmation device for agricultural machines equipped with endless track belts
JPS58154285A (en) * 1982-03-10 1983-09-13 Agency Of Ind Science & Technol Manufacture of diffraction grating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6341598U (en) * 1986-09-03 1988-03-18

Also Published As

Publication number Publication date
JPS53142180A (en) 1978-12-11

Similar Documents

Publication Publication Date Title
DE2814556C2 (en)
CH645231GA3 (en)
FR2377241B1 (en)
DE2727544C2 (en)
DE2707042C2 (en)
JPS568493B2 (en)
AU3353778A (en)
FR2377390B1 (en)
DE2759617C3 (en)
AU495917B2 (en)
AR210643A1 (en)
AU71461S (en)
BG25848A1 (en)
BG25839A1 (en)
BG23438A1 (en)
CH613674A5 (en)
BG25887A1 (en)
BE866391A (en)
BG25860A1 (en)
BG25855A1 (en)
BG25853A1 (en)
BG25852A1 (en)
BG25851A1 (en)
BG25850A1 (en)
BG25829A1 (en)