JPS568465B2 - - Google Patents
Info
- Publication number
- JPS568465B2 JPS568465B2 JP6640672A JP6640672A JPS568465B2 JP S568465 B2 JPS568465 B2 JP S568465B2 JP 6640672 A JP6640672 A JP 6640672A JP 6640672 A JP6640672 A JP 6640672A JP S568465 B2 JPS568465 B2 JP S568465B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/12—Lenses electrostatic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17181571A | 1971-08-16 | 1971-08-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4829368A JPS4829368A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-04-18 |
| JPS568465B2 true JPS568465B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-02-24 |
Family
ID=22625237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6640672A Expired JPS568465B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1971-08-16 | 1972-07-04 |
Country Status (4)
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5444552B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1974-09-20 | 1979-12-26 | ||
| SE427738B (sv) * | 1981-02-11 | 1983-05-02 | Siporex Int Ab | Forfarande vid bortforslande av i vatten uppslamningsbart material fran en yta, jemte anordning for anvendnig vid forfarandet |
| JPS58169855A (ja) * | 1982-03-31 | 1983-10-06 | Jeol Ltd | イオン銃 |
-
1972
- 1972-05-29 IT IT50582/72A patent/IT960799B/it active
- 1972-07-04 JP JP6640672A patent/JPS568465B2/ja not_active Expired
- 1972-08-04 DD DD164863A patent/DD97977A5/xx unknown
- 1972-08-14 SE SE7210514A patent/SE377861B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4829368A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-04-18 |
| DD97977A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-05-20 |
| IT960799B (it) | 1973-11-30 |
| SE377861B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1975-07-28 |