JPS568352B2 - - Google Patents
Info
- Publication number
- JPS568352B2 JPS568352B2 JP14296875A JP14296875A JPS568352B2 JP S568352 B2 JPS568352 B2 JP S568352B2 JP 14296875 A JP14296875 A JP 14296875A JP 14296875 A JP14296875 A JP 14296875A JP S568352 B2 JPS568352 B2 JP S568352B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50142968A JPS5267630A (en) | 1975-12-03 | 1975-12-03 | Pattern printing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50142968A JPS5267630A (en) | 1975-12-03 | 1975-12-03 | Pattern printing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5267630A JPS5267630A (en) | 1977-06-04 |
| JPS568352B2 true JPS568352B2 (cs) | 1981-02-23 |
Family
ID=15327832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50142968A Granted JPS5267630A (en) | 1975-12-03 | 1975-12-03 | Pattern printing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5267630A (cs) |
-
1975
- 1975-12-03 JP JP50142968A patent/JPS5267630A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5267630A (en) | 1977-06-04 |