JPS56827Y2 - - Google Patents

Info

Publication number
JPS56827Y2
JPS56827Y2 JP1977153282U JP15328277U JPS56827Y2 JP S56827 Y2 JPS56827 Y2 JP S56827Y2 JP 1977153282 U JP1977153282 U JP 1977153282U JP 15328277 U JP15328277 U JP 15328277U JP S56827 Y2 JPS56827 Y2 JP S56827Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977153282U
Other languages
Japanese (ja)
Other versions
JPS5479219U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977153282U priority Critical patent/JPS56827Y2/ja
Publication of JPS5479219U publication Critical patent/JPS5479219U/ja
Application granted granted Critical
Publication of JPS56827Y2 publication Critical patent/JPS56827Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP1977153282U 1977-11-15 1977-11-15 Expired JPS56827Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977153282U JPS56827Y2 (en:Method) 1977-11-15 1977-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977153282U JPS56827Y2 (en:Method) 1977-11-15 1977-11-15

Publications (2)

Publication Number Publication Date
JPS5479219U JPS5479219U (en:Method) 1979-06-05
JPS56827Y2 true JPS56827Y2 (en:Method) 1981-01-10

Family

ID=29140320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977153282U Expired JPS56827Y2 (en:Method) 1977-11-15 1977-11-15

Country Status (1)

Country Link
JP (1) JPS56827Y2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6914114B2 (en) 2000-07-17 2005-07-05 Honeywell International Inc. Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56826Y2 (en:Method) * 1977-06-15 1981-01-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6914114B2 (en) 2000-07-17 2005-07-05 Honeywell International Inc. Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography

Also Published As

Publication number Publication date
JPS5479219U (en:Method) 1979-06-05

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