JPS5682722A - Device for housing basket - Google Patents

Device for housing basket

Info

Publication number
JPS5682722A
JPS5682722A JP15850179A JP15850179A JPS5682722A JP S5682722 A JPS5682722 A JP S5682722A JP 15850179 A JP15850179 A JP 15850179A JP 15850179 A JP15850179 A JP 15850179A JP S5682722 A JPS5682722 A JP S5682722A
Authority
JP
Japan
Prior art keywords
basket
conveying section
region
objective
convey
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15850179A
Other languages
Japanese (ja)
Inventor
Michifumi Ite
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15850179A priority Critical patent/JPS5682722A/en
Publication of JPS5682722A publication Critical patent/JPS5682722A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To improve work efficiency, by automating such operation that a basket containing semiconductor substrates or the like is selected and conveyed out to a prescribed position or housed.
CONSTITUTION: When a disc 3 is rotated by a driver 10 and an objective region 5 corresponds to a convey-in unit 6, the driver 10 is stopped. A basket is conveyed to a position just under the rear conveying section 6b of the convey-in unit 6 by its front conveying section 6a. The basket 1 on the front conveying section 6a is housed in the objective region 5 by the rear conveying section 6b. To take out the basket 1 from the region 5, the disc 3 is rotated by the driver 10 and the region 5 wherein the objective basket 1 is housed is stopped in a position corresponding to a convey- out unit 8. The objective basket 1 is taken out from the region 5 to a rear conveying section 8b by a front conveying section 8a.
COPYRIGHT: (C)1981,JPO&Japio
JP15850179A 1979-12-05 1979-12-05 Device for housing basket Pending JPS5682722A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15850179A JPS5682722A (en) 1979-12-05 1979-12-05 Device for housing basket

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15850179A JPS5682722A (en) 1979-12-05 1979-12-05 Device for housing basket

Publications (1)

Publication Number Publication Date
JPS5682722A true JPS5682722A (en) 1981-07-06

Family

ID=15673108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15850179A Pending JPS5682722A (en) 1979-12-05 1979-12-05 Device for housing basket

Country Status (1)

Country Link
JP (1) JPS5682722A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01182742A (en) * 1988-01-13 1989-07-20 Mitsubishi Electric Corp Exterior inspection machine for semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01182742A (en) * 1988-01-13 1989-07-20 Mitsubishi Electric Corp Exterior inspection machine for semiconductor device

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