JPS568105B2 - - Google Patents
Info
- Publication number
- JPS568105B2 JPS568105B2 JP3604772A JP3604772A JPS568105B2 JP S568105 B2 JPS568105 B2 JP S568105B2 JP 3604772 A JP3604772 A JP 3604772A JP 3604772 A JP3604772 A JP 3604772A JP S568105 B2 JPS568105 B2 JP S568105B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3604772A JPS568105B2 (en:Method) | 1972-04-12 | 1972-04-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3604772A JPS568105B2 (en:Method) | 1972-04-12 | 1972-04-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS48103088A JPS48103088A (en:Method) | 1973-12-24 |
| JPS568105B2 true JPS568105B2 (en:Method) | 1981-02-21 |
Family
ID=12458783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3604772A Expired JPS568105B2 (en:Method) | 1972-04-12 | 1972-04-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS568105B2 (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2908288B1 (de) * | 1979-03-03 | 1980-01-17 | Heraeus Schott Quarzschmelze | Glocke aus Quarzglas fuer halbleitertechnologische Zwecke |
| JPS59220916A (ja) * | 1983-05-31 | 1984-12-12 | Toshiba Corp | 気相成長方法及び装置 |
| JPS6390828U (en:Method) * | 1986-12-03 | 1988-06-13 |
-
1972
- 1972-04-12 JP JP3604772A patent/JPS568105B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS48103088A (en:Method) | 1973-12-24 |