JPS568105B2 - - Google Patents

Info

Publication number
JPS568105B2
JPS568105B2 JP3604772A JP3604772A JPS568105B2 JP S568105 B2 JPS568105 B2 JP S568105B2 JP 3604772 A JP3604772 A JP 3604772A JP 3604772 A JP3604772 A JP 3604772A JP S568105 B2 JPS568105 B2 JP S568105B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3604772A
Other languages
Japanese (ja)
Other versions
JPS48103088A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3604772A priority Critical patent/JPS568105B2/ja
Publication of JPS48103088A publication Critical patent/JPS48103088A/ja
Publication of JPS568105B2 publication Critical patent/JPS568105B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP3604772A 1972-04-12 1972-04-12 Expired JPS568105B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3604772A JPS568105B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-04-12 1972-04-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3604772A JPS568105B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-04-12 1972-04-12

Publications (2)

Publication Number Publication Date
JPS48103088A JPS48103088A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-12-24
JPS568105B2 true JPS568105B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-02-21

Family

ID=12458783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3604772A Expired JPS568105B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-04-12 1972-04-12

Country Status (1)

Country Link
JP (1) JPS568105B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2908288B1 (de) * 1979-03-03 1980-01-17 Heraeus Schott Quarzschmelze Glocke aus Quarzglas fuer halbleitertechnologische Zwecke
JPS59220916A (ja) * 1983-05-31 1984-12-12 Toshiba Corp 気相成長方法及び装置
JPS6390828U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-12-03 1988-06-13

Also Published As

Publication number Publication date
JPS48103088A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-12-24

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