JPS5678557U - - Google Patents
Info
- Publication number
- JPS5678557U JPS5678557U JP1979162238U JP16223879U JPS5678557U JP S5678557 U JPS5678557 U JP S5678557U JP 1979162238 U JP1979162238 U JP 1979162238U JP 16223879 U JP16223879 U JP 16223879U JP S5678557 U JPS5678557 U JP S5678557U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979162238U JPS5678557U (enExample) | 1979-11-22 | 1979-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979162238U JPS5678557U (enExample) | 1979-11-22 | 1979-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5678557U true JPS5678557U (enExample) | 1981-06-25 |
Family
ID=29673262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979162238U Pending JPS5678557U (enExample) | 1979-11-22 | 1979-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5678557U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5875832A (ja) * | 1981-10-30 | 1983-05-07 | Fujitsu Ltd | 荷電ビ−ム露光装置用の角形アパ−チヤ作成方法 |
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1979
- 1979-11-22 JP JP1979162238U patent/JPS5678557U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5875832A (ja) * | 1981-10-30 | 1983-05-07 | Fujitsu Ltd | 荷電ビ−ム露光装置用の角形アパ−チヤ作成方法 |