JPS5674643A - Optical information reader - Google Patents

Optical information reader

Info

Publication number
JPS5674643A
JPS5674643A JP15138179A JP15138179A JPS5674643A JP S5674643 A JPS5674643 A JP S5674643A JP 15138179 A JP15138179 A JP 15138179A JP 15138179 A JP15138179 A JP 15138179A JP S5674643 A JPS5674643 A JP S5674643A
Authority
JP
Japan
Prior art keywords
light source
luminous flux
diffusible
projecting
photoelectric conversion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15138179A
Other languages
Japanese (ja)
Inventor
Tadatami Mori
Isao Tofuku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15138179A priority Critical patent/JPS5674643A/en
Publication of JPS5674643A publication Critical patent/JPS5674643A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To easily discriminate a residual resist piece and an electrode pattern, by combining the light source for projecting the diffusible luminous flux and the light source for projecting the parallel luminous flux. CONSTITUTION:The first light source for projecting the diffusible luminous flux consists of a fluorescent lamp, and it is installed so that it is exactly opposed to the photoelectric conversion element 5. Also, the second light source for projecting the parallel luminous flux consists of a halogen lamp with a collimater 32, and it is installed so that the irradiation angle is shifted against the photoelectric conversion element 5. According to the light source of the diffusible luminous flux, almost same image pickup output can be obtained as to both the diffusible substance such as a resist, etc. and the nonelectrode (mask) formation part, but when the parallel luminous flux light source is installed so that the irradiation angle is shifted from the photoelectric conversion element, only the pickup output by the diffusible substance can be obtained, and therefore the residual resist piece can be discriminated easily by making said two light sources irradiate alternately.
JP15138179A 1979-11-22 1979-11-22 Optical information reader Pending JPS5674643A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15138179A JPS5674643A (en) 1979-11-22 1979-11-22 Optical information reader

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15138179A JPS5674643A (en) 1979-11-22 1979-11-22 Optical information reader

Publications (1)

Publication Number Publication Date
JPS5674643A true JPS5674643A (en) 1981-06-20

Family

ID=15517321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15138179A Pending JPS5674643A (en) 1979-11-22 1979-11-22 Optical information reader

Country Status (1)

Country Link
JP (1) JPS5674643A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10842332B2 (en) 2015-07-01 2020-11-24 Dyson Technology Limited Separating apparatus
US10953359B2 (en) 2015-07-01 2021-03-23 Dyson Technology Limited Separating apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10842332B2 (en) 2015-07-01 2020-11-24 Dyson Technology Limited Separating apparatus
US10953359B2 (en) 2015-07-01 2021-03-23 Dyson Technology Limited Separating apparatus

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