JPS567206B2 - - Google Patents
Info
- Publication number
- JPS567206B2 JPS567206B2 JP10212172A JP10212172A JPS567206B2 JP S567206 B2 JPS567206 B2 JP S567206B2 JP 10212172 A JP10212172 A JP 10212172A JP 10212172 A JP10212172 A JP 10212172A JP S567206 B2 JPS567206 B2 JP S567206B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10212172A JPS567206B2 (ja) | 1972-10-11 | 1972-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10212172A JPS567206B2 (ja) | 1972-10-11 | 1972-10-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4960538A JPS4960538A (ja) | 1974-06-12 |
| JPS567206B2 true JPS567206B2 (ja) | 1981-02-17 |
Family
ID=14318950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10212172A Expired JPS567206B2 (ja) | 1972-10-11 | 1972-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS567206B2 (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6652559B2 (ja) * | 2014-11-12 | 2020-02-26 | オーボテック リミテッド | 光学装置及び光学方法 |
| WO2017006306A1 (en) | 2015-07-09 | 2017-01-12 | Orbotech Ltd | Control of lift ejection angle |
-
1972
- 1972-10-11 JP JP10212172A patent/JPS567206B2/ja not_active Expired
Non-Patent Citations (1)
| Title |
|---|
| PROCEEDINGS OF THE IEEE#V54#N10 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4960538A (ja) | 1974-06-12 |