JPS5670247U - - Google Patents
Info
- Publication number
- JPS5670247U JPS5670247U JP15153479U JP15153479U JPS5670247U JP S5670247 U JPS5670247 U JP S5670247U JP 15153479 U JP15153479 U JP 15153479U JP 15153479 U JP15153479 U JP 15153479U JP S5670247 U JPS5670247 U JP S5670247U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Sealing Devices (AREA)
- Pistons, Piston Rings, And Cylinders (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15153479U JPS5919161Y2 (en) | 1979-11-02 | 1979-11-02 | combination seal ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15153479U JPS5919161Y2 (en) | 1979-11-02 | 1979-11-02 | combination seal ring |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5670247U true JPS5670247U (en) | 1981-06-10 |
| JPS5919161Y2 JPS5919161Y2 (en) | 1984-06-02 |
Family
ID=29382502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15153479U Expired JPS5919161Y2 (en) | 1979-11-02 | 1979-11-02 | combination seal ring |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5919161Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010056954A2 (en) * | 2008-11-13 | 2010-05-20 | Applied Materials, Inc. | Sealing apparatus for a process chamber |
| JP2011241912A (en) * | 2010-05-19 | 2011-12-01 | Smc Corp | Fluid pressure apparatus |
-
1979
- 1979-11-02 JP JP15153479U patent/JPS5919161Y2/en not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010056954A2 (en) * | 2008-11-13 | 2010-05-20 | Applied Materials, Inc. | Sealing apparatus for a process chamber |
| WO2010056954A3 (en) * | 2008-11-13 | 2010-08-05 | Applied Materials, Inc. | Sealing apparatus for a process chamber |
| CN102216656A (en) * | 2008-11-13 | 2011-10-12 | 应用材料股份有限公司 | Sealing apparatus for a process chamber |
| US9261193B2 (en) | 2008-11-13 | 2016-02-16 | Applied Materials, Inc. | Sealing apparatus for a process chamber |
| JP2011241912A (en) * | 2010-05-19 | 2011-12-01 | Smc Corp | Fluid pressure apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5919161Y2 (en) | 1984-06-02 |