JPS566570B2 - - Google Patents
Info
- Publication number
- JPS566570B2 JPS566570B2 JP12885676A JP12885676A JPS566570B2 JP S566570 B2 JPS566570 B2 JP S566570B2 JP 12885676 A JP12885676 A JP 12885676A JP 12885676 A JP12885676 A JP 12885676A JP S566570 B2 JPS566570 B2 JP S566570B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12885676A JPS5354674A (en) | 1976-10-28 | 1976-10-28 | Mark positioning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12885676A JPS5354674A (en) | 1976-10-28 | 1976-10-28 | Mark positioning method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5354674A JPS5354674A (en) | 1978-05-18 |
| JPS566570B2 true JPS566570B2 (oth) | 1981-02-12 |
Family
ID=14995051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12885676A Granted JPS5354674A (en) | 1976-10-28 | 1976-10-28 | Mark positioning method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5354674A (oth) |
-
1976
- 1976-10-28 JP JP12885676A patent/JPS5354674A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5354674A (en) | 1978-05-18 |