JPS566569B2 - - Google Patents
Info
- Publication number
- JPS566569B2 JPS566569B2 JP11454176A JP11454176A JPS566569B2 JP S566569 B2 JPS566569 B2 JP S566569B2 JP 11454176 A JP11454176 A JP 11454176A JP 11454176 A JP11454176 A JP 11454176A JP S566569 B2 JPS566569 B2 JP S566569B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11454176A JPS5340173A (en) | 1976-09-24 | 1976-09-24 | Transfer body position cotnroller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11454176A JPS5340173A (en) | 1976-09-24 | 1976-09-24 | Transfer body position cotnroller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5340173A JPS5340173A (en) | 1978-04-12 |
| JPS566569B2 true JPS566569B2 (cs) | 1981-02-12 |
Family
ID=14640337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11454176A Granted JPS5340173A (en) | 1976-09-24 | 1976-09-24 | Transfer body position cotnroller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5340173A (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6263317A (ja) * | 1986-09-16 | 1987-03-20 | Hitachi Ltd | 微小変位発生装置 |
| JPH0184108U (cs) * | 1987-11-24 | 1989-06-05 |
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1976
- 1976-09-24 JP JP11454176A patent/JPS5340173A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5340173A (en) | 1978-04-12 |