JPS5664928U - - Google Patents

Info

Publication number
JPS5664928U
JPS5664928U JP1979148051U JP14805179U JPS5664928U JP S5664928 U JPS5664928 U JP S5664928U JP 1979148051 U JP1979148051 U JP 1979148051U JP 14805179 U JP14805179 U JP 14805179U JP S5664928 U JPS5664928 U JP S5664928U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1979148051U
Other languages
Japanese (ja)
Other versions
JPS6110468Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979148051U priority Critical patent/JPS6110468Y2/ja
Publication of JPS5664928U publication Critical patent/JPS5664928U/ja
Application granted granted Critical
Publication of JPS6110468Y2 publication Critical patent/JPS6110468Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of Linear Motors (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Control Of Conveyors (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Control Of Position Or Direction (AREA)
JP1979148051U 1979-10-24 1979-10-24 Expired JPS6110468Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979148051U JPS6110468Y2 (enrdf_load_stackoverflow) 1979-10-24 1979-10-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979148051U JPS6110468Y2 (enrdf_load_stackoverflow) 1979-10-24 1979-10-24

Publications (2)

Publication Number Publication Date
JPS5664928U true JPS5664928U (enrdf_load_stackoverflow) 1981-05-30
JPS6110468Y2 JPS6110468Y2 (enrdf_load_stackoverflow) 1986-04-03

Family

ID=29379196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979148051U Expired JPS6110468Y2 (enrdf_load_stackoverflow) 1979-10-24 1979-10-24

Country Status (1)

Country Link
JP (1) JPS6110468Y2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946907U (ja) * 1982-09-21 1984-03-28 神鋼電機株式会社 搬送装置
JPS62107606A (ja) * 1985-11-02 1987-05-19 Hitachi Kiden Kogyo Ltd リニアモ−タを用いた搬送装置
JPS63196910A (ja) * 1987-02-12 1988-08-15 Toshiba Corp 浮上式搬送車の制御装置
JP2005351359A (ja) * 2004-06-10 2005-12-22 Ulvac Japan Ltd 真空処理装置の真空処理室におけるキャリアの位置決め装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946907U (ja) * 1982-09-21 1984-03-28 神鋼電機株式会社 搬送装置
JPS62107606A (ja) * 1985-11-02 1987-05-19 Hitachi Kiden Kogyo Ltd リニアモ−タを用いた搬送装置
JPS63196910A (ja) * 1987-02-12 1988-08-15 Toshiba Corp 浮上式搬送車の制御装置
JP2005351359A (ja) * 2004-06-10 2005-12-22 Ulvac Japan Ltd 真空処理装置の真空処理室におけるキャリアの位置決め装置

Also Published As

Publication number Publication date
JPS6110468Y2 (enrdf_load_stackoverflow) 1986-04-03

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