JPS5664928U - - Google Patents
Info
- Publication number
- JPS5664928U JPS5664928U JP1979148051U JP14805179U JPS5664928U JP S5664928 U JPS5664928 U JP S5664928U JP 1979148051 U JP1979148051 U JP 1979148051U JP 14805179 U JP14805179 U JP 14805179U JP S5664928 U JPS5664928 U JP S5664928U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1979148051U JPS6110468Y2 (en) | 1979-10-24 | 1979-10-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1979148051U JPS6110468Y2 (en) | 1979-10-24 | 1979-10-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5664928U true JPS5664928U (en) | 1981-05-30 |
JPS6110468Y2 JPS6110468Y2 (en) | 1986-04-03 |
Family
ID=29379196
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1979148051U Expired JPS6110468Y2 (en) | 1979-10-24 | 1979-10-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6110468Y2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5946907U (en) * | 1982-09-21 | 1984-03-28 | 神鋼電機株式会社 | Conveyance device |
JPS62107606A (en) * | 1985-11-02 | 1987-05-19 | Hitachi Kiden Kogyo Ltd | Conveyor using linear motor |
JPS63196910A (en) * | 1987-02-12 | 1988-08-15 | Toshiba Corp | Controller for floating type carriage |
JP2005351359A (en) * | 2004-06-10 | 2005-12-22 | Ulvac Japan Ltd | Positioner of carrier of vacuum processor in vacuum processing chamber |
-
1979
- 1979-10-24 JP JP1979148051U patent/JPS6110468Y2/ja not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5946907U (en) * | 1982-09-21 | 1984-03-28 | 神鋼電機株式会社 | Conveyance device |
JPS62107606A (en) * | 1985-11-02 | 1987-05-19 | Hitachi Kiden Kogyo Ltd | Conveyor using linear motor |
JPS63196910A (en) * | 1987-02-12 | 1988-08-15 | Toshiba Corp | Controller for floating type carriage |
JP2005351359A (en) * | 2004-06-10 | 2005-12-22 | Ulvac Japan Ltd | Positioner of carrier of vacuum processor in vacuum processing chamber |
Also Published As
Publication number | Publication date |
---|---|
JPS6110468Y2 (en) | 1986-04-03 |