JPS5664928U - - Google Patents

Info

Publication number
JPS5664928U
JPS5664928U JP1979148051U JP14805179U JPS5664928U JP S5664928 U JPS5664928 U JP S5664928U JP 1979148051 U JP1979148051 U JP 1979148051U JP 14805179 U JP14805179 U JP 14805179U JP S5664928 U JPS5664928 U JP S5664928U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1979148051U
Other languages
Japanese (ja)
Other versions
JPS6110468Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979148051U priority Critical patent/JPS6110468Y2/ja
Publication of JPS5664928U publication Critical patent/JPS5664928U/ja
Application granted granted Critical
Publication of JPS6110468Y2 publication Critical patent/JPS6110468Y2/ja
Expired legal-status Critical Current

Links

JP1979148051U 1979-10-24 1979-10-24 Expired JPS6110468Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979148051U JPS6110468Y2 (en) 1979-10-24 1979-10-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979148051U JPS6110468Y2 (en) 1979-10-24 1979-10-24

Publications (2)

Publication Number Publication Date
JPS5664928U true JPS5664928U (en) 1981-05-30
JPS6110468Y2 JPS6110468Y2 (en) 1986-04-03

Family

ID=29379196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979148051U Expired JPS6110468Y2 (en) 1979-10-24 1979-10-24

Country Status (1)

Country Link
JP (1) JPS6110468Y2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946907U (en) * 1982-09-21 1984-03-28 神鋼電機株式会社 Conveyance device
JPS62107606A (en) * 1985-11-02 1987-05-19 Hitachi Kiden Kogyo Ltd Conveyor using linear motor
JPS63196910A (en) * 1987-02-12 1988-08-15 Toshiba Corp Controller for floating type carriage
JP2005351359A (en) * 2004-06-10 2005-12-22 Ulvac Japan Ltd Positioner of carrier of vacuum processor in vacuum processing chamber

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946907U (en) * 1982-09-21 1984-03-28 神鋼電機株式会社 Conveyance device
JPS62107606A (en) * 1985-11-02 1987-05-19 Hitachi Kiden Kogyo Ltd Conveyor using linear motor
JPS63196910A (en) * 1987-02-12 1988-08-15 Toshiba Corp Controller for floating type carriage
JP2005351359A (en) * 2004-06-10 2005-12-22 Ulvac Japan Ltd Positioner of carrier of vacuum processor in vacuum processing chamber

Also Published As

Publication number Publication date
JPS6110468Y2 (en) 1986-04-03

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