JPS566183B2 - - Google Patents

Info

Publication number
JPS566183B2
JPS566183B2 JP6306175A JP6306175A JPS566183B2 JP S566183 B2 JPS566183 B2 JP S566183B2 JP 6306175 A JP6306175 A JP 6306175A JP 6306175 A JP6306175 A JP 6306175A JP S566183 B2 JPS566183 B2 JP S566183B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6306175A
Other languages
Japanese (ja)
Other versions
JPS51139766A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6306175A priority Critical patent/JPS51139766A/ja
Publication of JPS51139766A publication Critical patent/JPS51139766A/ja
Publication of JPS566183B2 publication Critical patent/JPS566183B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Closed-Circuit Television Systems (AREA)
JP6306175A 1975-05-28 1975-05-28 Pattern inpsection device Granted JPS51139766A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6306175A JPS51139766A (en) 1975-05-28 1975-05-28 Pattern inpsection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6306175A JPS51139766A (en) 1975-05-28 1975-05-28 Pattern inpsection device

Publications (2)

Publication Number Publication Date
JPS51139766A JPS51139766A (en) 1976-12-02
JPS566183B2 true JPS566183B2 (enrdf_load_stackoverflow) 1981-02-09

Family

ID=13218437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6306175A Granted JPS51139766A (en) 1975-05-28 1975-05-28 Pattern inpsection device

Country Status (1)

Country Link
JP (1) JPS51139766A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4292672A (en) * 1979-03-19 1981-09-29 Rca Corporation Inspection system for detecting defects in regular patterns

Also Published As

Publication number Publication date
JPS51139766A (en) 1976-12-02

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