JPS566144B2 - - Google Patents

Info

Publication number
JPS566144B2
JPS566144B2 JP14275976A JP14275976A JPS566144B2 JP S566144 B2 JPS566144 B2 JP S566144B2 JP 14275976 A JP14275976 A JP 14275976A JP 14275976 A JP14275976 A JP 14275976A JP S566144 B2 JPS566144 B2 JP S566144B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14275976A
Other languages
Japanese (ja)
Other versions
JPS5367352A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14275976A priority Critical patent/JPS5367352A/ja
Publication of JPS5367352A publication Critical patent/JPS5367352A/ja
Publication of JPS566144B2 publication Critical patent/JPS566144B2/ja
Granted legal-status Critical Current

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Landscapes

  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14275976A 1976-11-27 1976-11-27 Measuring method of resistivity for double-layer film Granted JPS5367352A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14275976A JPS5367352A (en) 1976-11-27 1976-11-27 Measuring method of resistivity for double-layer film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14275976A JPS5367352A (en) 1976-11-27 1976-11-27 Measuring method of resistivity for double-layer film

Publications (2)

Publication Number Publication Date
JPS5367352A JPS5367352A (en) 1978-06-15
JPS566144B2 true JPS566144B2 (US07754267-20100713-C00017.png) 1981-02-09

Family

ID=15322904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14275976A Granted JPS5367352A (en) 1976-11-27 1976-11-27 Measuring method of resistivity for double-layer film

Country Status (1)

Country Link
JP (1) JPS5367352A (US07754267-20100713-C00017.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58145140A (ja) * 1982-02-23 1983-08-29 Nec Corp 半導体特性測定装置

Also Published As

Publication number Publication date
JPS5367352A (en) 1978-06-15

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