JPS565963B2 - - Google Patents

Info

Publication number
JPS565963B2
JPS565963B2 JP15206776A JP15206776A JPS565963B2 JP S565963 B2 JPS565963 B2 JP S565963B2 JP 15206776 A JP15206776 A JP 15206776A JP 15206776 A JP15206776 A JP 15206776A JP S565963 B2 JPS565963 B2 JP S565963B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15206776A
Other versions
JPS5376847A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15206776A priority Critical patent/JPS5376847A/ja
Publication of JPS5376847A publication Critical patent/JPS5376847A/ja
Publication of JPS565963B2 publication Critical patent/JPS565963B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optical Integrated Circuits (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP15206776A 1976-12-20 1976-12-20 Pattern forming method Granted JPS5376847A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15206776A JPS5376847A (en) 1976-12-20 1976-12-20 Pattern forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15206776A JPS5376847A (en) 1976-12-20 1976-12-20 Pattern forming method

Publications (2)

Publication Number Publication Date
JPS5376847A JPS5376847A (en) 1978-07-07
JPS565963B2 true JPS565963B2 (ja) 1981-02-07

Family

ID=15532319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15206776A Granted JPS5376847A (en) 1976-12-20 1976-12-20 Pattern forming method

Country Status (1)

Country Link
JP (1) JPS5376847A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1741485A1 (en) * 2004-03-27 2007-01-10 Niigata Technology Licensing Organization Photoreactive thin film processing method and photoreactive thin film processing apparatus

Also Published As

Publication number Publication date
JPS5376847A (en) 1978-07-07

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