JPS565686B2 - - Google Patents

Info

Publication number
JPS565686B2
JPS565686B2 JP14428976A JP14428976A JPS565686B2 JP S565686 B2 JPS565686 B2 JP S565686B2 JP 14428976 A JP14428976 A JP 14428976A JP 14428976 A JP14428976 A JP 14428976A JP S565686 B2 JPS565686 B2 JP S565686B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14428976A
Other versions
JPS5373500A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14428976A priority Critical patent/JPS5373500A/ja
Publication of JPS5373500A publication Critical patent/JPS5373500A/ja
Publication of JPS565686B2 publication Critical patent/JPS565686B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP14428976A 1976-11-30 1976-11-30 Method and apparatus for metallizing silicon carbide Granted JPS5373500A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14428976A JPS5373500A (en) 1976-11-30 1976-11-30 Method and apparatus for metallizing silicon carbide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14428976A JPS5373500A (en) 1976-11-30 1976-11-30 Method and apparatus for metallizing silicon carbide

Publications (2)

Publication Number Publication Date
JPS5373500A JPS5373500A (en) 1978-06-29
JPS565686B2 true JPS565686B2 (ja) 1981-02-06

Family

ID=15358597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14428976A Granted JPS5373500A (en) 1976-11-30 1976-11-30 Method and apparatus for metallizing silicon carbide

Country Status (1)

Country Link
JP (1) JPS5373500A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5774978U (ja) * 1980-10-20 1982-05-08

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216531B2 (ja) * 1972-08-14 1977-05-10

Also Published As

Publication number Publication date
JPS5373500A (en) 1978-06-29

Similar Documents

Publication Publication Date Title
JPS52152927U (ja)
CS192123B1 (ja)
CS190015B1 (ja)
CS180533B1 (ja)
CS178388B1 (ja)
CS178364B1 (ja)
CS177776B1 (ja)
CS177749B1 (ja)
CS177444B1 (ja)
CS175505B1 (ja)
JPS5319731U (ja)
CH604676A5 (ja)
DD125016A5 (ja)
CH604847A5 (ja)
CH610953A5 (ja)
CH615021A5 (ja)
CH615796GA3 (ja)
CH603383A5 (ja)
CH603218A5 (ja)
CH602227A5 (ja)
CH601865A5 (ja)
CH601558A5 (ja)
CH600671A5 (ja)
CH599809A5 (ja)
CH594305A5 (ja)