JPS5653545Y2 - - Google Patents

Info

Publication number
JPS5653545Y2
JPS5653545Y2 JP12276779U JP12276779U JPS5653545Y2 JP S5653545 Y2 JPS5653545 Y2 JP S5653545Y2 JP 12276779 U JP12276779 U JP 12276779U JP 12276779 U JP12276779 U JP 12276779U JP S5653545 Y2 JPS5653545 Y2 JP S5653545Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12276779U
Other languages
Japanese (ja)
Other versions
JPS5640658U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12276779U priority Critical patent/JPS5653545Y2/ja
Publication of JPS5640658U publication Critical patent/JPS5640658U/ja
Application granted granted Critical
Publication of JPS5653545Y2 publication Critical patent/JPS5653545Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP12276779U 1979-09-05 1979-09-05 Expired JPS5653545Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12276779U JPS5653545Y2 (enrdf_load_stackoverflow) 1979-09-05 1979-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12276779U JPS5653545Y2 (enrdf_load_stackoverflow) 1979-09-05 1979-09-05

Publications (2)

Publication Number Publication Date
JPS5640658U JPS5640658U (enrdf_load_stackoverflow) 1981-04-15
JPS5653545Y2 true JPS5653545Y2 (enrdf_load_stackoverflow) 1981-12-14

Family

ID=29354797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12276779U Expired JPS5653545Y2 (enrdf_load_stackoverflow) 1979-09-05 1979-09-05

Country Status (1)

Country Link
JP (1) JPS5653545Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60132470U (ja) * 1984-02-15 1985-09-04 富士通株式会社 分子線結晶成長装置

Also Published As

Publication number Publication date
JPS5640658U (enrdf_load_stackoverflow) 1981-04-15

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