JPS565322B2 - - Google Patents

Info

Publication number
JPS565322B2
JPS565322B2 JP10778875A JP10778875A JPS565322B2 JP S565322 B2 JPS565322 B2 JP S565322B2 JP 10778875 A JP10778875 A JP 10778875A JP 10778875 A JP10778875 A JP 10778875A JP S565322 B2 JPS565322 B2 JP S565322B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10778875A
Other languages
Japanese (ja)
Other versions
JPS5232352A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50107788A priority Critical patent/JPS5232352A/ja
Publication of JPS5232352A publication Critical patent/JPS5232352A/ja
Publication of JPS565322B2 publication Critical patent/JPS565322B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP50107788A 1975-09-05 1975-09-05 Laser interference scale by "2 beam- 1 beam" optical system Granted JPS5232352A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50107788A JPS5232352A (en) 1975-09-05 1975-09-05 Laser interference scale by "2 beam- 1 beam" optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50107788A JPS5232352A (en) 1975-09-05 1975-09-05 Laser interference scale by "2 beam- 1 beam" optical system

Publications (2)

Publication Number Publication Date
JPS5232352A JPS5232352A (en) 1977-03-11
JPS565322B2 true JPS565322B2 (enrdf_load_stackoverflow) 1981-02-04

Family

ID=14468031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50107788A Granted JPS5232352A (en) 1975-09-05 1975-09-05 Laser interference scale by "2 beam- 1 beam" optical system

Country Status (1)

Country Link
JP (1) JPS5232352A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5232352A (en) 1977-03-11

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