JPS565309Y2 - - Google Patents
Info
- Publication number
- JPS565309Y2 JPS565309Y2 JP1976040974U JP4097476U JPS565309Y2 JP S565309 Y2 JPS565309 Y2 JP S565309Y2 JP 1976040974 U JP1976040974 U JP 1976040974U JP 4097476 U JP4097476 U JP 4097476U JP S565309 Y2 JPS565309 Y2 JP S565309Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976040974U JPS565309Y2 (en:Method) | 1976-04-05 | 1976-04-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976040974U JPS565309Y2 (en:Method) | 1976-04-05 | 1976-04-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52133164U JPS52133164U (en:Method) | 1977-10-08 |
| JPS565309Y2 true JPS565309Y2 (en:Method) | 1981-02-05 |
Family
ID=28500078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976040974U Expired JPS565309Y2 (en:Method) | 1976-04-05 | 1976-04-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS565309Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2872637B2 (ja) * | 1995-07-10 | 1999-03-17 | アプライド マテリアルズ インコーポレイテッド | マイクロ波プラズマベースアプリケータ |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ZA775158B (en) * | 1976-09-07 | 1978-07-26 | Weyerhaeuser Co | Catalytic oxidation of vapor effluent from oxygen pulping reactor |
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1976
- 1976-04-05 JP JP1976040974U patent/JPS565309Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52133164U (en:Method) | 1977-10-08 |