JPS565309Y2 - - Google Patents

Info

Publication number
JPS565309Y2
JPS565309Y2 JP1976040974U JP4097476U JPS565309Y2 JP S565309 Y2 JPS565309 Y2 JP S565309Y2 JP 1976040974 U JP1976040974 U JP 1976040974U JP 4097476 U JP4097476 U JP 4097476U JP S565309 Y2 JPS565309 Y2 JP S565309Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976040974U
Other languages
Japanese (ja)
Other versions
JPS52133164U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976040974U priority Critical patent/JPS565309Y2/ja
Publication of JPS52133164U publication Critical patent/JPS52133164U/ja
Application granted granted Critical
Publication of JPS565309Y2 publication Critical patent/JPS565309Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • ing And Chemical Polishing (AREA)
JP1976040974U 1976-04-05 1976-04-05 Expired JPS565309Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976040974U JPS565309Y2 (en) 1976-04-05 1976-04-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976040974U JPS565309Y2 (en) 1976-04-05 1976-04-05

Publications (2)

Publication Number Publication Date
JPS52133164U JPS52133164U (en) 1977-10-08
JPS565309Y2 true JPS565309Y2 (en) 1981-02-05

Family

ID=28500078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976040974U Expired JPS565309Y2 (en) 1976-04-05 1976-04-05

Country Status (1)

Country Link
JP (1) JPS565309Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2872637B2 (en) * 1995-07-10 1999-03-17 アプライド マテリアルズ インコーポレイテッド Microwave plasma based applicator

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5341505A (en) * 1976-09-07 1978-04-15 Weyerhaeuser Co Process for contact oxydation of pulping reactor leaving gas with oxygen

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5341505A (en) * 1976-09-07 1978-04-15 Weyerhaeuser Co Process for contact oxydation of pulping reactor leaving gas with oxygen

Also Published As

Publication number Publication date
JPS52133164U (en) 1977-10-08

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