JPS5652853B2 - - Google Patents

Info

Publication number
JPS5652853B2
JPS5652853B2 JP4848676A JP4848676A JPS5652853B2 JP S5652853 B2 JPS5652853 B2 JP S5652853B2 JP 4848676 A JP4848676 A JP 4848676A JP 4848676 A JP4848676 A JP 4848676A JP S5652853 B2 JPS5652853 B2 JP S5652853B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4848676A
Other languages
Japanese (ja)
Other versions
JPS52133085A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4848676A priority Critical patent/JPS52133085A/ja
Publication of JPS52133085A publication Critical patent/JPS52133085A/ja
Publication of JPS5652853B2 publication Critical patent/JPS5652853B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP4848676A 1976-04-30 1976-04-30 Production of single silicon crystal of high purity Granted JPS52133085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4848676A JPS52133085A (en) 1976-04-30 1976-04-30 Production of single silicon crystal of high purity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4848676A JPS52133085A (en) 1976-04-30 1976-04-30 Production of single silicon crystal of high purity

Publications (2)

Publication Number Publication Date
JPS52133085A JPS52133085A (en) 1977-11-08
JPS5652853B2 true JPS5652853B2 (enrdf_load_stackoverflow) 1981-12-15

Family

ID=12804706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4848676A Granted JPS52133085A (en) 1976-04-30 1976-04-30 Production of single silicon crystal of high purity

Country Status (1)

Country Link
JP (1) JPS52133085A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100406378C (zh) 2000-05-11 2008-07-30 德山株式会社 多晶硅的生产装置

Also Published As

Publication number Publication date
JPS52133085A (en) 1977-11-08

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