JPS5652587A - Low temperature pump having radiant shielding mechanism - Google Patents

Low temperature pump having radiant shielding mechanism

Info

Publication number
JPS5652587A
JPS5652587A JP12807480A JP12807480A JPS5652587A JP S5652587 A JPS5652587 A JP S5652587A JP 12807480 A JP12807480 A JP 12807480A JP 12807480 A JP12807480 A JP 12807480A JP S5652587 A JPS5652587 A JP S5652587A
Authority
JP
Japan
Prior art keywords
low temperature
shielding mechanism
temperature pump
radiant
radiant shielding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12807480A
Other languages
Japanese (ja)
Inventor
Merurin Ueruchi Kimo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of JPS5652587A publication Critical patent/JPS5652587A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
JP12807480A 1979-09-28 1980-09-17 Low temperature pump having radiant shielding mechanism Pending JPS5652587A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7986079A 1979-09-28 1979-09-28

Publications (1)

Publication Number Publication Date
JPS5652587A true JPS5652587A (en) 1981-05-11

Family

ID=22153264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12807480A Pending JPS5652587A (en) 1979-09-28 1980-09-17 Low temperature pump having radiant shielding mechanism

Country Status (5)

Country Link
JP (1) JPS5652587A (en)
CH (1) CH653746A5 (en)
DE (1) DE3034934A1 (en)
FR (1) FR2466639A1 (en)
GB (1) GB2059512B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992200U (en) * 1982-12-13 1984-06-22 株式会社セオクレ−ン safety ladder
JPH02111458U (en) * 1989-02-22 1990-09-06
JP2009215917A (en) * 2008-03-07 2009-09-24 Sumitomo Heavy Ind Ltd Cryopump and evacuation method
JP2014173424A (en) * 2013-03-05 2014-09-22 Sumitomo Heavy Ind Ltd Cryopump
CN110985339A (en) * 2019-11-25 2020-04-10 中国工程物理研究院材料研究所 Column built-in cryogenic pump

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3232324C2 (en) * 1982-08-31 1986-08-28 Leybold-Heraeus GmbH, 5000 Köln Refrigerator-operated cryopump
US4494381A (en) * 1983-05-13 1985-01-22 Helix Technology Corporation Cryopump with improved adsorption capacity
IT1201263B (en) * 1985-03-26 1989-01-27 Galileo Spa Off CRYOGENIC REFRIGERATOR PUMP WITH SCREEN GEOMETRY SUITABLE TO REACH HIGH EFFICIENCY AND LONG LIFE
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
US6347925B1 (en) * 2000-06-29 2002-02-19 Beacon Power Corporation Flywheel system with parallel pumping arrangement

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53141914A (en) * 1977-05-16 1978-12-11 Air Prod & Chem Method of and apparatus for improving low temperature pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53141914A (en) * 1977-05-16 1978-12-11 Air Prod & Chem Method of and apparatus for improving low temperature pump

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992200U (en) * 1982-12-13 1984-06-22 株式会社セオクレ−ン safety ladder
JPH02111458U (en) * 1989-02-22 1990-09-06
JP2009215917A (en) * 2008-03-07 2009-09-24 Sumitomo Heavy Ind Ltd Cryopump and evacuation method
JP2014173424A (en) * 2013-03-05 2014-09-22 Sumitomo Heavy Ind Ltd Cryopump
CN110985339A (en) * 2019-11-25 2020-04-10 中国工程物理研究院材料研究所 Column built-in cryogenic pump

Also Published As

Publication number Publication date
FR2466639A1 (en) 1981-04-10
DE3034934A1 (en) 1982-04-22
GB2059512A (en) 1981-04-23
CH653746A5 (en) 1986-01-15
GB2059512B (en) 1983-10-19

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