JPS5651499B2 - - Google Patents
Info
- Publication number
- JPS5651499B2 JPS5651499B2 JP8803378A JP8803378A JPS5651499B2 JP S5651499 B2 JPS5651499 B2 JP S5651499B2 JP 8803378 A JP8803378 A JP 8803378A JP 8803378 A JP8803378 A JP 8803378A JP S5651499 B2 JPS5651499 B2 JP S5651499B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8803378A JPS5515232A (en) | 1978-07-19 | 1978-07-19 | Electronic ray exposure prototype and elctronic ray exposure method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8803378A JPS5515232A (en) | 1978-07-19 | 1978-07-19 | Electronic ray exposure prototype and elctronic ray exposure method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5515232A JPS5515232A (en) | 1980-02-02 |
| JPS5651499B2 true JPS5651499B2 (en) | 1981-12-05 |
Family
ID=13931502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8803378A Granted JPS5515232A (en) | 1978-07-19 | 1978-07-19 | Electronic ray exposure prototype and elctronic ray exposure method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5515232A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5883599A (en) * | 1981-11-11 | 1983-05-19 | Automob Antipollut & Saf Res Center | Driving device for step motor |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0134269B1 (en) * | 1983-08-11 | 1988-01-07 | Ibm Deutschland Gmbh | Electron beam projection lithography |
| KR910000756B1 (en) * | 1984-11-20 | 1991-02-06 | Fujitsu Ltd | Method for projection photoelectron image |
| KR100868887B1 (en) * | 2004-01-12 | 2008-11-17 | 더 리전트 오브 더 유니버시티 오브 캘리포니아 | Nanoscale electric lithography |
-
1978
- 1978-07-19 JP JP8803378A patent/JPS5515232A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5883599A (en) * | 1981-11-11 | 1983-05-19 | Automob Antipollut & Saf Res Center | Driving device for step motor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5515232A (en) | 1980-02-02 |