JPS5651316Y2 - - Google Patents
Info
- Publication number
- JPS5651316Y2 JPS5651316Y2 JP17511376U JP17511376U JPS5651316Y2 JP S5651316 Y2 JPS5651316 Y2 JP S5651316Y2 JP 17511376 U JP17511376 U JP 17511376U JP 17511376 U JP17511376 U JP 17511376U JP S5651316 Y2 JPS5651316 Y2 JP S5651316Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17511376U JPS5651316Y2 (en:Method) | 1976-12-28 | 1976-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17511376U JPS5651316Y2 (en:Method) | 1976-12-28 | 1976-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5394069U JPS5394069U (en:Method) | 1978-08-01 |
| JPS5651316Y2 true JPS5651316Y2 (en:Method) | 1981-12-01 |
Family
ID=28782548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17511376U Expired JPS5651316Y2 (en:Method) | 1976-12-28 | 1976-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5651316Y2 (en:Method) |
-
1976
- 1976-12-28 JP JP17511376U patent/JPS5651316Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5394069U (en:Method) | 1978-08-01 |