JPS565060B2 - - Google Patents
Info
- Publication number
- JPS565060B2 JPS565060B2 JP4461276A JP4461276A JPS565060B2 JP S565060 B2 JPS565060 B2 JP S565060B2 JP 4461276 A JP4461276 A JP 4461276A JP 4461276 A JP4461276 A JP 4461276A JP S565060 B2 JPS565060 B2 JP S565060B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4461276A JPS52127767A (en) | 1976-04-19 | 1976-04-19 | Plasma etching method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4461276A JPS52127767A (en) | 1976-04-19 | 1976-04-19 | Plasma etching method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52127767A JPS52127767A (en) | 1977-10-26 |
| JPS565060B2 true JPS565060B2 (cs) | 1981-02-03 |
Family
ID=12696254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4461276A Granted JPS52127767A (en) | 1976-04-19 | 1976-04-19 | Plasma etching method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52127767A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6022485A (en) * | 1997-10-17 | 2000-02-08 | International Business Machines Corporation | Method for controlled removal of material from a solid surface |
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1976
- 1976-04-19 JP JP4461276A patent/JPS52127767A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52127767A (en) | 1977-10-26 |