JPS5648962B2 - - Google Patents
Info
- Publication number
- JPS5648962B2 JPS5648962B2 JP732488A JP248873A JPS5648962B2 JP S5648962 B2 JPS5648962 B2 JP S5648962B2 JP 732488 A JP732488 A JP 732488A JP 248873 A JP248873 A JP 248873A JP S5648962 B2 JPS5648962 B2 JP S5648962B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP732488A JPS5648962B2 (en:Method) | 1972-12-29 | 1972-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP732488A JPS5648962B2 (en:Method) | 1972-12-29 | 1972-12-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4991381A JPS4991381A (en:Method) | 1974-08-31 |
| JPS5648962B2 true JPS5648962B2 (en:Method) | 1981-11-19 |
Family
ID=11530732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP732488A Expired JPS5648962B2 (en:Method) | 1972-12-29 | 1972-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5648962B2 (en:Method) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3361600A (en) * | 1965-08-09 | 1968-01-02 | Ibm | Method of doping epitaxially grown semiconductor material |
-
1972
- 1972-12-29 JP JP732488A patent/JPS5648962B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4991381A (en:Method) | 1974-08-31 |