JPS5648868B2 - - Google Patents
Info
- Publication number
- JPS5648868B2 JPS5648868B2 JP3809872A JP3809872A JPS5648868B2 JP S5648868 B2 JPS5648868 B2 JP S5648868B2 JP 3809872 A JP3809872 A JP 3809872A JP 3809872 A JP3809872 A JP 3809872A JP S5648868 B2 JPS5648868 B2 JP S5648868B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Projection-Type Copiers In General (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3809872A JPS5648868B2 (sh) | 1972-04-13 | 1972-04-13 | |
| US304841A US3871764A (en) | 1972-04-05 | 1972-11-08 | Pattern generator apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3809872A JPS5648868B2 (sh) | 1972-04-13 | 1972-04-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS48103274A JPS48103274A (sh) | 1973-12-25 |
| JPS5648868B2 true JPS5648868B2 (sh) | 1981-11-18 |
Family
ID=12515989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3809872A Expired JPS5648868B2 (sh) | 1972-04-05 | 1972-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5648868B2 (sh) |
-
1972
- 1972-04-13 JP JP3809872A patent/JPS5648868B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS48103274A (sh) | 1973-12-25 |