JPS5647950Y2 - - Google Patents

Info

Publication number
JPS5647950Y2
JPS5647950Y2 JP1976178444U JP17844476U JPS5647950Y2 JP S5647950 Y2 JPS5647950 Y2 JP S5647950Y2 JP 1976178444 U JP1976178444 U JP 1976178444U JP 17844476 U JP17844476 U JP 17844476U JP S5647950 Y2 JPS5647950 Y2 JP S5647950Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976178444U
Other languages
Japanese (ja)
Other versions
JPS5394565U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976178444U priority Critical patent/JPS5647950Y2/ja
Publication of JPS5394565U publication Critical patent/JPS5394565U/ja
Application granted granted Critical
Publication of JPS5647950Y2 publication Critical patent/JPS5647950Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1976178444U 1976-12-29 1976-12-29 Expired JPS5647950Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976178444U JPS5647950Y2 (cs) 1976-12-29 1976-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976178444U JPS5647950Y2 (cs) 1976-12-29 1976-12-29

Publications (2)

Publication Number Publication Date
JPS5394565U JPS5394565U (cs) 1978-08-01
JPS5647950Y2 true JPS5647950Y2 (cs) 1981-11-10

Family

ID=28785672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976178444U Expired JPS5647950Y2 (cs) 1976-12-29 1976-12-29

Country Status (1)

Country Link
JP (1) JPS5647950Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4397724A (en) * 1981-08-24 1983-08-09 Bell Telephone Laboratories, Incorporated Apparatus and method for plasma-assisted etching of wafers

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3474021A (en) * 1966-01-12 1969-10-21 Ibm Method of forming openings using sequential sputtering and chemical etching

Also Published As

Publication number Publication date
JPS5394565U (cs) 1978-08-01

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