JPS5647946Y2 - - Google Patents

Info

Publication number
JPS5647946Y2
JPS5647946Y2 JP1976159115U JP15911576U JPS5647946Y2 JP S5647946 Y2 JPS5647946 Y2 JP S5647946Y2 JP 1976159115 U JP1976159115 U JP 1976159115U JP 15911576 U JP15911576 U JP 15911576U JP S5647946 Y2 JPS5647946 Y2 JP S5647946Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976159115U
Other languages
Japanese (ja)
Other versions
JPS5377672U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976159115U priority Critical patent/JPS5647946Y2/ja
Publication of JPS5377672U publication Critical patent/JPS5377672U/ja
Application granted granted Critical
Publication of JPS5647946Y2 publication Critical patent/JPS5647946Y2/ja
Expired legal-status Critical Current

Links

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  • Electron Beam Exposure (AREA)
JP1976159115U 1976-11-26 1976-11-26 Expired JPS5647946Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976159115U JPS5647946Y2 (enrdf_load_stackoverflow) 1976-11-26 1976-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976159115U JPS5647946Y2 (enrdf_load_stackoverflow) 1976-11-26 1976-11-26

Publications (2)

Publication Number Publication Date
JPS5377672U JPS5377672U (enrdf_load_stackoverflow) 1978-06-28
JPS5647946Y2 true JPS5647946Y2 (enrdf_load_stackoverflow) 1981-11-10

Family

ID=28767071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976159115U Expired JPS5647946Y2 (enrdf_load_stackoverflow) 1976-11-26 1976-11-26

Country Status (1)

Country Link
JP (1) JPS5647946Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3729966A (en) * 1972-02-02 1973-05-01 Ibm Apparatus for contouring the surface of thin elements

Also Published As

Publication number Publication date
JPS5377672U (enrdf_load_stackoverflow) 1978-06-28

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