JPS5647946Y2 - - Google Patents

Info

Publication number
JPS5647946Y2
JPS5647946Y2 JP1976159115U JP15911576U JPS5647946Y2 JP S5647946 Y2 JPS5647946 Y2 JP S5647946Y2 JP 1976159115 U JP1976159115 U JP 1976159115U JP 15911576 U JP15911576 U JP 15911576U JP S5647946 Y2 JPS5647946 Y2 JP S5647946Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976159115U
Other languages
Japanese (ja)
Other versions
JPS5377672U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976159115U priority Critical patent/JPS5647946Y2/ja
Publication of JPS5377672U publication Critical patent/JPS5377672U/ja
Application granted granted Critical
Publication of JPS5647946Y2 publication Critical patent/JPS5647946Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1976159115U 1976-11-26 1976-11-26 Expired JPS5647946Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976159115U JPS5647946Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-11-26 1976-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976159115U JPS5647946Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-11-26 1976-11-26

Publications (2)

Publication Number Publication Date
JPS5377672U JPS5377672U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-06-28
JPS5647946Y2 true JPS5647946Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-11-10

Family

ID=28767071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976159115U Expired JPS5647946Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-11-26 1976-11-26

Country Status (1)

Country Link
JP (1) JPS5647946Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3729966A (en) * 1972-02-02 1973-05-01 Ibm Apparatus for contouring the surface of thin elements

Also Published As

Publication number Publication date
JPS5377672U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-06-28

Similar Documents

Publication Publication Date Title
JPS52155425U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5360069U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5310201U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS175515B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS175526B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS176990B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS178377B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH605537A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH606961A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH596359A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH596538A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH598976A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH599094A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH599829A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH600138A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH600372A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH601492A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH601666A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH601873A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH601874A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH602212A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH602222A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH604041A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH605286A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG23265A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)