JPS5645728B2 - - Google Patents

Info

Publication number
JPS5645728B2
JPS5645728B2 JP5298177A JP5298177A JPS5645728B2 JP S5645728 B2 JPS5645728 B2 JP S5645728B2 JP 5298177 A JP5298177 A JP 5298177A JP 5298177 A JP5298177 A JP 5298177A JP S5645728 B2 JPS5645728 B2 JP S5645728B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5298177A
Other languages
Japanese (ja)
Other versions
JPS53138591A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5298177A priority Critical patent/JPS53138591A/ja
Publication of JPS53138591A publication Critical patent/JPS53138591A/ja
Publication of JPS5645728B2 publication Critical patent/JPS5645728B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Accessories And Tools For Shearing Machines (AREA)
  • Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
  • Jigs For Machine Tools (AREA)
  • Feeding Of Workpieces (AREA)
JP5298177A 1977-05-09 1977-05-09 Vacuum holder of material plate Granted JPS53138591A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5298177A JPS53138591A (en) 1977-05-09 1977-05-09 Vacuum holder of material plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5298177A JPS53138591A (en) 1977-05-09 1977-05-09 Vacuum holder of material plate

Publications (2)

Publication Number Publication Date
JPS53138591A JPS53138591A (en) 1978-12-04
JPS5645728B2 true JPS5645728B2 (esLanguage) 1981-10-28

Family

ID=12930073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5298177A Granted JPS53138591A (en) 1977-05-09 1977-05-09 Vacuum holder of material plate

Country Status (1)

Country Link
JP (1) JPS53138591A (esLanguage)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6327872Y2 (esLanguage) * 1980-04-21 1988-07-27
US4530635A (en) * 1983-06-15 1985-07-23 The Perkin-Elmer Corporation Wafer transferring chuck assembly

Also Published As

Publication number Publication date
JPS53138591A (en) 1978-12-04

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