JPS5645293B2 - - Google Patents
Info
- Publication number
- JPS5645293B2 JPS5645293B2 JP14709576A JP14709576A JPS5645293B2 JP S5645293 B2 JPS5645293 B2 JP S5645293B2 JP 14709576 A JP14709576 A JP 14709576A JP 14709576 A JP14709576 A JP 14709576A JP S5645293 B2 JPS5645293 B2 JP S5645293B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14709576A JPS5372461A (en) | 1976-12-09 | 1976-12-09 | Etching method in manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14709576A JPS5372461A (en) | 1976-12-09 | 1976-12-09 | Etching method in manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5372461A JPS5372461A (en) | 1978-06-27 |
| JPS5645293B2 true JPS5645293B2 (en) | 1981-10-26 |
Family
ID=15422357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14709576A Granted JPS5372461A (en) | 1976-12-09 | 1976-12-09 | Etching method in manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5372461A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5755588A (en) * | 1980-09-20 | 1982-04-02 | Fujitsu Ltd | Production of bubble element |
-
1976
- 1976-12-09 JP JP14709576A patent/JPS5372461A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5372461A (en) | 1978-06-27 |